Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9134631 | Lithographic apparatus and device manufacturing method | Jan Jaap Kuit, Frank Staals | 2015-09-15 |
| 7626684 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Andre Bernardus Jeunink, M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot +3 more | 2009-12-01 |
| 7466413 | Marker structure, mask pattern, alignment method and lithographic method and apparatus | Jozef Maria Finders, Mircea Dusa, Richard Johannes Franciscus Van Haren, Luis Alberto Colina Santamaria Colina, Eric Henri Jan Hendrickx +1 more | 2008-12-16 |
| 7403264 | Lithographic projection apparatus and a device manufacturing method using such lithographic projection apparatus | Andre Bernardus Jeunink, M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot +3 more | 2008-07-22 |
| 7262831 | Lithographic projection apparatus and device manufacturing method using such lithographic projection apparatus | M'hamed Akhssay, Johannes Jacobus Matheus Baselmans, Franciscus Antonius Chrysogonus Marie Commissaris, Simon De Groot, Andre Bernardus Jeunink +2 more | 2007-08-28 |