Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7394520 | Temperature conditioned load lock, lithographic apparatus comprising such a load lock and method of manufacturing a substrate with such a load lock | Albert Jan Hendrik Klomp, Jan Frederik Hoogkamp, Raimond Visser, Josephus Cornelius Johannes Antonius Vugts, Leo Wilhelmus Maria Kuipers +1 more | 2008-07-01 |
| 7360716 | Method of determining at least one marking element on a substrate | Jacobus Johannes Govardus Maria Van Oosterhout, Joseph L. Horijon | 2008-04-22 |