Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9082521 | EUV multilayer mirror with interlayer and lithographic apparatus using the mirror | Denis Alexandrovich Glushkov, Vadim Yevgenyevich Banine, Leonid Aizikovitch Sjmaenok, Nikolay Nikolaevitch Salashchenko | 2015-07-14 |