| 12028958 |
High-brightness laser produced plasma source and method of generation and collection radiation |
Samir Ellwi, Denis Aleksandrovich Glushkov, Vladimir Vitalievich Ivanov, Oleg Borisovich Khristoforov, Konstantin Nikolaevich Koshelev +4 more |
2024-07-02 |
| 11869742 |
X-ray source with rotating liquid-metal target |
Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +6 more |
2024-01-09 |
| 11252810 |
Short-wavelength radiation source with multisectional collector module and method of collecting radiation |
Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +6 more |
2022-02-15 |
| 10887973 |
High brightness laser-produced plasma light source |
Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +6 more |
2021-01-05 |
| 10638588 |
High-brightness laser produced plasma source and methods for generating radiation and mitigating debris |
Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +3 more |
2020-04-28 |
| 10588210 |
High brightness short-wavelength radiation source (variants) |
Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich Krivokorytov, Vladimir Mikhailovich Krivtsun, Aleksandr Andreevich Lash +6 more |
2020-03-10 |
| 9476841 |
High-brightness LPP EUV light source |
Pavel Stanislavovich Antsiferov, Vladimir Vitalievich Ivanov, Konstantin Nikolaevich Koshelev, Mikhail Sergeyevich KRYVOKORYTOV, Vladimir Mikhailovich Krivtsun +7 more |
2016-10-25 |