Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7486384 | Lithographic support structure | Patricius Aloysius Jacobus Tinnemans, Edwin Johan Buis, Sjoerd Nicolaas Lambertus Donders, Jan Van Elp, Jan Frederik Hoogkamp +8 more | 2009-02-03 |
| 7295283 | Lithographic apparatus and device manufacturing method | Henrikus Herman Marie Cox, Petrus Marinus Christianus Maria Van Den Biggelaar, Frits Van Der Meulen, Jan-Gerard Cornelis Van Der Toorn, Arend-Jan Migchelbrink | 2007-11-13 |
| 6856376 | Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby | Gert-Jan Heerens, Sjoerd Nicolaas Lambertus Donders, Aschwin Lodewijk Hendricus Johannes Van Meer, Thomas Josephus Maria Castenmiller | 2005-02-15 |
| 6791664 | Lithographic apparatus, device manufacturing method, and device manufacturing thereby | Frank Auer, Jan Holterman, Marinus P. Koster, Theodorus Jacobus Adrianus de Vries | 2004-09-14 |