| 8553201 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Koen Jacobus Johannes Maria Zaal, Minne Cuperus |
2013-10-08 |
| 8446563 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2013-05-21 |
| 8368868 |
Lithographic apparatus with gas pressure means for controlling a planar position of a patterning device contactless |
Johannes Petrus Martinus Bernardus Vermeulen, Marcel Koenraad Marie Baggen, Hans Butler, Jan Van Eijk, Andre Bernardus Jeunink +7 more |
2013-02-05 |
| 8279407 |
Stage system and lithographic apparatus comprising such stage system |
Ramidin Izair Kamidi, Emiel Jozef Melanie Eussen, Ronald Casper Kunst, Engelbertus Antonius Fransiscus Van Der Pasch, Marcel François Heertjes +1 more |
2012-10-02 |
| 8125616 |
Lithographic apparatus with pre-formed flexible transportation line |
Marcus Martinus Petrus Adrianus Vermeulen, Godfried Katharina Hubertus Franciscus Geelen, Jérôme François Sylvain Virgile Van Loo |
2012-02-28 |
| 8102513 |
Method for positioning an object by an electromagnetic motor, stage apparatus and lithographic apparatus |
Thomas Augustus Mattaar |
2012-01-24 |
| 8031325 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2011-10-04 |
| 7936444 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more |
2011-05-03 |
| 7859644 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method |
Jan-Gerard Cornelis Van Der Toorn, Hans Butler, Evert Hendrik Jan Draaijer, Nicolaas Ten Kate, Frits Van Der Meulen +4 more |
2010-12-28 |
| 7782446 |
Stage system and lithographic apparatus comprising such stage system |
Ramidin Izair Kamidi, Ronald Casper Kunst, Youssef Karel Maria De Vos |
2010-08-24 |
| 7710540 |
Lithographic apparatus and device manufacturing method |
Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens, Wilhelmus Franciscus Johannes Simons, Paul Petrus Joannes Berkvens |
2010-05-04 |
| 7701550 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam, Nicolaas Ten Kate +8 more |
2010-04-20 |
| 7679720 |
Apparatus configured to position a workpiece |
Michel Pieter Dansberg, Sebastiaan Maria Johannes Cornelissen, Robert Johannes Petrus Van Diesen, Nicolaas Rudolf Kemper, Robert-Han Munnig-Schmidt +2 more |
2010-03-16 |
| 7671963 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Koen Jacobus Johannes Maria Zaal, Minne Cuperus |
2010-03-02 |
| 7602470 |
Lithographic apparatus and device manufacturing method |
Nicolaas Rudolf Kemper, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christian Alexander Hoogendam, Nicolaas Ten Kate +12 more |
2009-10-13 |
| 7492440 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal, Edwin Johan Buis, Noud Jan Gilissen, Harmen Klaas Van Der Schoot |
2009-02-17 |
| 7486381 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens, Koen Jacobus Johannes Maria Zaal, Minne Cuperus |
2009-02-03 |
| 7483120 |
Displacement measurement system, lithographic apparatus, displacement measurement method and device manufacturing method |
Bernardus Antonius Johannes Luttikhuis, Erik Roelof Loopstra, Engelbertus Antonius Fransiscus Van Der Pasch, Harmen Klaas Van Der Schoot |
2009-01-27 |
| 7468589 |
Lithographic apparatus having a controlled motor, and motor control system and method |
Hans Butler, Sven Antoin Johan Hol |
2008-12-23 |
| 7456935 |
Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table |
Sven Antoin Johan Hol, Petrus Matthijs Henricus Vosters |
2008-11-25 |
| 7417711 |
Lithographic apparatus and device manufacturing method |
Hernes Jacobs, Petrus Matthijs Henricus Vosters |
2008-08-26 |
| 7359032 |
Lithographic apparatus and device manufacturing method |
Michel Pieter Dansberg, Sebastiaan Maria Johannes Cornelissen, Robert Johannes Petrus Van Diesen, Nicolaas Rudolf Kemper, Robert-Han Munnig Schmidt +2 more |
2008-04-15 |
| 7352434 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Levinus Pieter Bakker, Johannes Jacobus Matheus Baselmans, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +12 more |
2008-04-01 |
| 7330238 |
Lithographic apparatus, immersion projection apparatus and device manufacturing method |
Jan-Gerard Cornelis Van Der Toorn, Hans Butler, Evert Hendrik Jan Draaijer, Nicolaas Ten Kate, Frits Van Der Meulen +4 more |
2008-02-12 |
| 7327437 |
Lithographic apparatus and device manufacturing method |
Koen Jacobus Johannes Maria Zaal |
2008-02-05 |