Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386270 | Mode control of photonic crystal fiber based broadband radiation sources | Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Jan Adrianus Boer, Edwin Johannes Cornelis Bos +5 more | 2025-08-12 |
| 12237639 | Hollow-core photonic crystal fiber based broadband radiation generator | John Travers, Federico Belli, Malte Christian Brahms, Andreas Johannes Antonius Brouns | 2025-02-25 |
| 12050409 | Assembly for collimating broadband radiation | Yongfeng Ni, Andreas Johannes Antonius Brouns | 2024-07-30 |
| 11687009 | Mode control of photonic crystal fiber based broadband radiation sources | Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Jan Adrianus Boer, Edwin Johannes Cornelis Bos +5 more | 2023-06-27 |
| 11619887 | Assembly for collimating broadband radiation | Yongfeng Ni, Andreas Johannes Antonius Brouns | 2023-04-04 |
| 11563298 | Hollow-core photonic crystal fiber based broadband radiation generator | John Travers, Federico Belli, Malte Christian Brahms, Andreas Johannes Antonius Brouns | 2023-01-24 |
| 11360396 | Mode control of photonic crystal fiber based broadband radiation sources | Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Jan Adrianus Boer, Edwin Johannes Cornelis Bos +5 more | 2022-06-14 |
| 11327412 | Topography measurement system | Martinus Cornelis Reijnen, Paulus Antonius Andreas Teunissen | 2022-05-10 |
| 11275313 | Metrology apparatus with radiation source having multiple broadband outputs | Paul William Scholtes-Van Eijk | 2022-03-15 |
| 10990021 | Metrology apparatus with radiation source having multiple broadband outputs | Paul William Scholtes-Van Eijk | 2021-04-27 |
| 10520824 | Wavelength combining of multiple source | Parag Vinayak Kelkar, Paulus Antonius Andreas Teunissen | 2019-12-31 |
| 8125615 | Optical focus sensor, an inspection apparatus and a lithographic apparatus | Willem Kalf | 2012-02-28 |
| 7839506 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Alexander Straaijer | 2010-11-23 |
| 7701577 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | Alexander Straaijer | 2010-04-20 |
| 7630070 | Scatterometer, a lithographic apparatus and a focus analysis method | — | 2009-12-08 |
| 7557934 | Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method | — | 2009-07-07 |