Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411415 | Lithographic apparatus and method for illumination uniformity correction | Nikolaos Sotiropoulos, Albertus HARTGERS, Michael Frederik Ypma | 2025-09-09 |
| 10845706 | Mirror array | Tian Gang, Mehdi Yousefi Moghaddam | 2020-11-24 |
| 8699000 | Illumination system for a lithographic apparatus | Steffen Winkler | 2014-04-15 |