| 9316929 |
EUV exposure apparatus with reflective elements having reduced influence of temperature variation |
Norman Baer, Ulrich Loering, Oliver Natt, Gero Wittich, Timo Laufer +7 more |
2016-04-19 |
| 9285685 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graupner +1 more |
2016-03-15 |
| 9170500 |
Lithographic apparatus and device manufacturing method with corrective positioning of reflective element |
Koen Van Ingen Schenau, Gosse Charles De Vries |
2015-10-27 |
| 9164401 |
Projection system and lithographic apparatus |
Erik Roelof Loopstra, Wilhelmus Petrus De Boeij, Hans Butler, Robertus Johannes Marinus De Jongh, Timotheus Franciscus Sengers +2 more |
2015-10-20 |
| 9134629 |
Illumination system, lithographic apparatus and method of forming an illumination mode |
Erik Roelof Loopstra, Koen Van Ingen Schenau, Christian Wagner, Gosse Charles De Vries |
2015-09-15 |
| 9097982 |
Radiation system, radiation collector, radiation beam conditioning system, spectral purity filter for radiation system and method for forming a spectral purity filter |
Vadim Yevgenyevich Banine, Wilhelmus Petrus De Boeij, Antonius Johannes Josephus Van Dijsseldonk, Erik Roelof Loopstra, Gerardus Hubertus Petrus Maria Swinkels |
2015-08-04 |
| 9052605 |
Illumination system for lithographic apparatus with control system to effect an adjustment of an imaging parameter |
Koen Van Ingen Schenau, Gosse Charles De Vries |
2015-06-09 |
| 8901521 |
Module and method for producing extreme ultraviolet radiation |
Tjarko Adriaan Rudolf Van Empel, Vadim Yevgenyevich Banine, Vladimir Vitalevich Ivanov, Erik Roelof Loopstra, Johannes Hubertus Josephina Moors +4 more |
2014-12-02 |
| 8896809 |
Lithographic apparatus and device manufacturing method |
Judocus Marie Dominicus Stoeldraijer, Erik Roelof Loopstra, Diederik Jan Maas |
2014-11-25 |
| 8867021 |
Illumination system, lithographic apparatus and method of adjusting an illumination mode |
Gosse Charles De Vries, Edwin Johan Buis, Marinus Johannes Maria Van Dam, Fidelus Adrianus Boon, Hermanus Johannes Maria Kreuwel |
2014-10-21 |
| 8830444 |
Lithographic apparatus and method |
Igor Petrus Maria Bouchoms, Antonius Johannes Josephus Van Dijsseldonk, Markus Franciscus Antonius Eurlings |
2014-09-09 |
| 8797504 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Leon Martin Levasier, Yuri Johannes Gabriël Van De Vijver, Oleg Viacheslavovich Voznyi +9 more |
2014-08-05 |
| 8749756 |
Lithographic apparatus and device manufacturing method |
Yuri Johannes Gabriël Van De Vijver, Gerardus Hubertus Petrus Maria Swinkels, Hendrikus Gijsbertus Schimmel, Dzmitry Labetski, Tjarko Adriaan Rudolf Van Empel |
2014-06-10 |
| 8730448 |
Lithographic apparatus and device manufacturing method |
Han-Kwang Nienhuys, Martinus Agnes Willem Cuijpers, Nicolaas Ten Kate, Leon Martin Levasier, Yuri Johannes Gabriël Van De Vijver +11 more |
2014-05-20 |
| 8711330 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner +1 more |
2014-04-29 |
| 8704199 |
Alignment of collector device in lithographic apparatus |
Michel Fransois Hubert Klaassen, Sylvain Dutartre |
2014-04-22 |
| 8570489 |
Lithographic projection apparatus and method of compensating perturbation factors |
Antonius Johannes Josephus Van Dijsseldonk, Hans Van Der Laan, Diederik Jan Maas |
2013-10-29 |
| 8115900 |
Lithographic apparatus and device manufacturing method |
Yuri Johannes Gabriël Van De Vijver, Gerardus Hubertus Petrus Maria Swinkels, Hendrikus Gijsbertus Schimmel, Dzmitry Labetski, Tjarko Adriaan Rudolf Van Empel |
2012-02-14 |
| 7961293 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner +1 more |
2011-06-14 |
| 7889321 |
Illumination system for illuminating a patterning device and method for manufacturing an illumination system |
Hendricus Johannes Maria Meijer |
2011-02-15 |
| 7816658 |
Extreme ultra-violet lithographic apparatus and device manufacturing method |
Johannes Hubertus Josephina Moors |
2010-10-19 |
| 7374869 |
Lithographic processing method and device manufactured thereby |
Carsten Kohler |
2008-05-20 |
| 7352435 |
Lithographic apparatus and device manufacturing method |
Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Adrianus Franciscus Petrus Engelen, Jozef Maria Finders, Paul Graeupner +1 more |
2008-04-01 |
| 7199861 |
Lithographic apparatus and device manufacturing method |
Maurice Henricus Franciscus Janssen, Rene Hubert Jacobus Carpaij |
2007-04-03 |
| 7177010 |
Lithographic apparatus and device manufacturing method |
Hans Van Der Laan, Uwe Mickan, Markus Franciscus Antonius Eurlings |
2007-02-13 |