Issued Patents All Time
Showing 26–50 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8129702 | Radiation system with contamination barrier | Levinus Pieter Bakker, Johannes Maria Freriks, Frank Jeroen Pieter Schuurmans, Jakob Vijfvinkel, Wilhelmus Josephus Box | 2012-03-06 |
| 8027026 | Lithographic apparatus and device manufacturing method | Matthew Lipson, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk, Ronald A. Wilklow +1 more | 2011-09-27 |
| 7894040 | Lithographic apparatus and device manufacturing method | Matthew Lipson, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk, Ronald A. Wilklow +1 more | 2011-02-22 |
| 7808611 | Lithographic apparatus and device manufacturing method using acidic liquid | Bob Streefkerk, Wendy Fransisca Johanna Gehoel-Van Ansem | 2010-10-05 |
| 7804574 | Lithographic apparatus and device manufacturing method using acidic liquid | Bob Streefkerk, Wendy Fransisca Johanna Gehoel-Van Ansem | 2010-09-28 |
| 7800079 | Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Yurii Victorvitch Sidelnikov +1 more | 2010-09-21 |
| 7763355 | Device manufacturing method, top coat material and substrate | Johannes Catharinus Hubertus Mulkens | 2010-07-27 |
| 7746445 | Lithographic apparatus, device manufacturing method and a substrate | Johannes Catharinus Hubertus Mulkens, Bob Streefkerk | 2010-06-29 |
| 7737425 | Contamination barrier with expandable lamellas | Levinus Pieter Bakker, Johannes Maria Freriks, Frank Jeroen Pieter Schuurmans, Jakob Vijfvinkel, Wilhelmus Josephus Box | 2010-06-15 |
| 7733459 | Lithographic apparatus and device manufacturing method | Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra, Jeroen Johannes Sophia Maria Mertens +4 more | 2010-06-08 |
| 7697116 | Lithographic apparatus and device manufacturing method | Hans Van Der Laan, Hendrikus Robertus Marie Van Greevenbroek | 2010-04-13 |
| 7684008 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Theodorus Hubertus Josephus Bisschops, Theodorus Marinus Modderman | 2010-03-23 |
| 7528929 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Richard Joseph Bruls, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +8 more | 2009-05-05 |
| 7491661 | Device manufacturing method, top coat material and substrate | Johannes Catharinus Hubertus Mulkens | 2009-02-17 |
| 7473907 | Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illumination | Wolfgang Singer, Martin Antoni, Johannes Wangler, Markus Weiss, Vadim Yevgenyevich Banine +5 more | 2009-01-06 |
| 7362413 | Uniformity correction for lithographic apparatus | Alexander Kremer, Erik Roelof Loopstra | 2008-04-22 |
| 7333178 | Lithographic apparatus and device manufacturing method | Hako Botma, Markus Franciscus Antonius Eurlings | 2008-02-19 |
| 7326522 | Device manufacturing method and a substrate | — | 2008-02-05 |
| 7317504 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit, Vadim Yevgenyevich Banine, Theodorus Hubertus Josephus Bisschops, Theodorus Marinus Modderman | 2008-01-08 |
| 7277158 | Lithographic apparatus and device manufacturing method | — | 2007-10-02 |
| 7259827 | Diffuser unit, lithographic apparatus, method for homogenizing a beam of radiation, a device manufacturing method and device manufactured thereby | — | 2007-08-21 |
| 7247866 | Contamination barrier with expandable lamellas | Levinus Pieter Bakker, Johannes Maria Freriks, Frank Jeroen Pieter Schuurmans, Jakob Vijfvinkel, Wilhelmus Josephus Box | 2007-07-24 |
| 7224440 | Lithographic apparatus and device manufacturing method | Stefan Geerte Kruijswijk, Markus Franciscus Antonius Eurlings, Heine Melle Mulder | 2007-05-29 |
| 7224430 | Optical component, optical system including such an optical component, lithographic apparatus, method of correcting apodization in an optical system, device manufacturing method, and device manufactured thereby | — | 2007-05-29 |
| 7206059 | Stationary and dynamic radial transverse electric polarizer for high numerical aperture systems | Donis Flagello, Kevin Cummings, Alexander Straaijer | 2007-04-17 |