Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8427627 | Lithographic apparatus and methods | Hans Jansen, Vasco Miguel Matias Serrao | 2013-04-23 |
| 7773235 | Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus | Haico Victor Kok, Ron Van De Laak, Johannes Maria Kuiper, Gerbrand Van Der Zouw, Hoite Pieter Theodoor Tolsma | 2010-08-10 |
| 7409302 | Method and apparatus for vibration detection and vibration analysis, and lithographic apparatus equipped with such an apparatus | Haico Victor Kok, Ron Van De Laak, Johannes Maria Kuiper, Gerbrand Van Der Zouw, Hoite Pieter Theodoor Tolsma | 2008-08-05 |
| 7308368 | Method and apparatus for vibration detection, method and apparatus for vibration analysis, lithographic apparatus, device manufacturing method, and computer program | Haico Victor Kok, Ron Van De Laak, Hans Kuiper | 2007-12-11 |