Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7282701 | Sensor for use in a lithographic apparatus | Marcus Adrianus Van De Kerhof, Borgert Kruizinga, Timotheus Franciscus Sengers, Bearrach Moest, Marc Antonius Maria Haast +3 more | 2007-10-16 |
| 7242475 | Method of determining aberration of a projection system of a lithographic apparatus | Johannes Jacobus Matheus Baselmans | 2007-07-10 |
| 7187431 | Lithographic apparatus, method of determining properties thereof and computer program | Johannes Jacobus Matheus Baselmans | 2007-03-06 |
| 7113255 | Grating patch arrangement, lithographic apparatus, method of testing, device manufacturing method, and device manufactured thereby | Sherman K. Poultney | 2006-09-26 |
| 6888151 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Jan Evert Van Der Werf | 2005-05-03 |
| 6747282 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Mark Kroon, Jan Evert Van Der Werf | 2004-06-08 |