Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10670978 | Method and apparatus for spectrally broadening radiation | King Pui Leung, Tao Chen | 2020-06-02 |
| 10481507 | Measurement method comprising in-situ printing of apparatus mark and corresponding apparatus | Igor Matheus Petronella Aarts, Haico Victor Kok, Eric Brian Catey | 2019-11-19 |
| 10082740 | Feedback control system of an alignment system | Tao Chen, King Pui Leung | 2018-09-25 |
| 7508514 | Correction of off-axis translation of optical elements in an optical zoom assembly | — | 2009-03-24 |
| 7472579 | Liquid flow proximity sensor for use in immersion lithography | — | 2009-01-06 |
| 7272976 | Pressure sensor | Boguslaw Gajdeczko | 2007-09-25 |
| 7124624 | High-resolution gas gauge proximity sensor | Boguslaw Gajdeczko, Kenneth M. Bogursky, Daniel N. Galburt, Willy M. Sander | 2006-10-24 |
| 7021119 | Liquid flow proximity sensor for use in immersion lithography | — | 2006-04-04 |
| 7010958 | High-resolution gas gauge proximity sensor | Boguslaw Gajdeczko, Kenneth M. Bogursky, Daniel N. Galburt, Willy M. Sander | 2006-03-14 |