Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788765 | Method and apparatus for measuring a structure on a substrate | Stefan Michiel Witte, Alessandro Antoncecchi, Stephen EDWARD, Hao Zhang, Paulus Clemens Maria PLANKEN +3 more | 2020-09-29 |
| 10788766 | Metrology sensor, lithographic apparatus and method for manufacturing devices | Simon Reinald HUISMAN, Duygu Akbulut, Alessandro Polo, Simon Gijsbert Josephus Mathijssen | 2020-09-29 |
| 10649345 | Methods and apparatuses for measurement of a parameter of a feature fabricated on a substrate | Maxim PISARENCO, Markus Gerardus Martinus Maria Van Kraaij | 2020-05-12 |
| 10599047 | Metrology apparatus, lithographic system, and method of measuring a structure | Janneke Ravensbergen, Nitesh Pandey, Zili Zhou, Armand Eugene Albert Koolen, Bastiaan Onne Fagginger Auer +1 more | 2020-03-24 |
| 10527959 | Position sensor, lithographic apparatus and method for manufacturing devices | Simon Reinald HUISMAN, Simon Gijsbert Josephus Mathijssen, Duygu Akbulut, Alessandro Polo | 2020-01-07 |
| 10317808 | Position sensing arrangement and lithographic apparatus including such an arrangement, position sensing method and device manufacturing method | Simon Reinald HUISMAN, Alessandro Polo, Duygu Akbulut, Arie Jeffrey Den Boef | 2019-06-11 |
| 10303064 | Radiation conditioning system, illumination system and metrology apparatus, device manufacturing method | Teunis Willem Tukker, Johannes Matheus Marie De Wit, Jonas Mertes, Gerbrand Van Der Zouw | 2019-05-28 |
| 10234767 | Device and method for processing a radiation beam with coherence | Nitesh Pandey, Duygu Akbulut, Teunis Willem Tukker, Johannes Matheus Marie De Wit | 2019-03-19 |