Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405227 | Method for region of interest processing for reticle particle detection | Peter Kochersperger, Christopher Michael DOHAN, Justin Kreuzer, Michal Emanuel Pawlowski, Aage Bendiksen +3 more | 2025-09-02 |
| 11526091 | Sensor apparatus and method for lithographic measurements | Tamer Elazhary, Justin Kreuzer, Yuxiang Lin | 2022-12-13 |
| 10247940 | Objective lens system | — | 2019-04-02 |