Issued Patents All Time
Showing 51–62 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809827 | Self referencing mark independent alignment sensor | — | 2004-10-26 |
| 6778258 | Wafer handling system for use in lithography patterning | Santiago del Puerto, Stephen Roux | 2004-08-17 |
| 6680798 | Optical reduction system with control of illumination polarization | — | 2004-01-20 |
| 6628406 | Self referencing mark independent alignment sensor | — | 2003-09-30 |
| 6522483 | Optical reduction system with elimination of reticle diffraction induced bias | — | 2003-02-18 |
| 6360012 | In situ projection optic metrology method and apparatus | — | 2002-03-19 |
| 5757160 | Moving interferometer wafer stage | — | 1998-05-26 |
| 5559601 | Mask and wafer diffraction grating alignment system wherein the diffracted light beams return substantially along an incident angle | Gregg M. Gallatin, Michael L. Nelson | 1996-09-24 |
| 4913524 | Synthetic imaging technique | — | 1990-04-03 |
| 4617681 | Bistable aligner cartridge foot | Carlo LaFiandra | 1986-10-14 |
| 4534047 | Mask ring assembly for X-ray lithography | Warren Deschenaux, Gregory P. Hughes, Carlo La Fiandra | 1985-08-06 |
| 4335313 | Method and apparatus for aligning an opaque mask with an integrated circuit wafer | David H. Kittell | 1982-06-15 |