Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9506743 | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Justin Kreuzer, Simon Gijsbert Josephus Mathijssen, Gerrit Johannes Nijmeijer, Patricius Aloysius Jacobus Tinnemans +1 more | 2016-11-29 |
| RE44434 | Optical position measuring system and method using a low coherence light source | — | 2013-08-13 |
| 7573580 | Optical position measuring system and method using a low coherence light source | — | 2009-08-11 |