Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7619738 | Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus | Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Henry Megens, Maurits Van Der Schaar | 2009-11-17 |
| 7355675 | Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus | Marco Johannes Annemarie Pieters, Jan-Peter Hauschild, Coen Van De Vin | 2008-04-08 |
| 7330261 | Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus | Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Henry Megens, Maurits Van Der Schaar | 2008-02-12 |