Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7355675 | Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus | Sanjay Lalbahadoersing, Marco Johannes Annemarie Pieters, Jan-Peter Hauschild | 2008-04-08 |
| 7209214 | Lithographic apparatus focus test method and system, and device manufacturing method | Jan-Peter Hauschild, Marco Johannes Annemarie Pieters | 2007-04-24 |