Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10394137 | Inspection method, lithographic apparatus, mask and substrate | Youri Johannes Laurentius Maria Van Dommelen, Peter David Engblom, Lambertus Gerardus Maria Kessels, Arie Jeffrey Den Boef, Kaustuve Bhattacharyya +1 more | 2019-08-27 |
| 10001711 | Inspection method, lithographic apparatus, mask and substrate | Youri Johannes Laurentius Maria Van Dommelen, Peter David Engblom, Lambertus Gerardus Maria Kessels, Arie Jeffrey Den Boef, Kaustuve Bhattacharyya +1 more | 2018-06-19 |
| 7355675 | Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus | Sanjay Lalbahadoersing, Jan-Peter Hauschild, Coen Van De Vin | 2008-04-08 |
| 7209214 | Lithographic apparatus focus test method and system, and device manufacturing method | Jan-Peter Hauschild, Coen Van De Vin | 2007-04-24 |