Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835954 | Inspection method and apparatus, substrates for use therein and device manufacturing method | Erik Willem Bogaart, Arie Jeffrey Den Boef, Simon Gijsbert Josephus Mathijssen | 2017-12-05 |
| 9726991 | Patterning device, method of producing a marker on a substrate and device manufacturing method | Johannes Jacobus Matheus Baselmans, Daniëlle Elisabeth Maria Palmen | 2017-08-08 |
| 9454084 | Method to determine the usefulness of alignment marks to correct overlay, and a combination of a lithographic apparatus and an overlay measurement system | Irina Lyulina, Remi Daniel Marie Edart, Antoine Gaston Marie Kiers, Michael Kubis | 2016-09-27 |
| 9377700 | Determining position and curvature information directly from a surface of a patterning device | Mark Josef Schuster, Santiago del Puerto, Daniel Nathan Burbank, Duncan Walter Bromley | 2016-06-28 |
| 9280057 | Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus | David Deckers, Sami Musa | 2016-03-08 |
| 9046385 | Alignment measurement system, lithographic apparatus, and a method to determine alignment in a lithographic apparatus | Sami Musa, David Deckers | 2015-06-02 |
| 8982347 | Alignment mark deformation estimating method, substrate position predicting method, alignment system and lithographic apparatus | Xiuhong Wei, Richard Johannes Franciscus Van Haren, Marcus Adrianus Van De Kerkhof, Everhardus Cornelis Mos, Hubertus Johannes Gertrudus Simons +4 more | 2015-03-17 |
| 8908152 | Lithographic apparatus and device manufacturing method to determine improved absolute position of exposure fields using mark structures | Jozef Cornelis Antonius Roijers, Patrick Warnaar, Marc Van Kemenade, Hoite Pieter Theodoor Tolsma | 2014-12-09 |
| 8208121 | Alignment mark and a method of aligning a substrate comprising such an alignment mark | Manfred Gawein Tenner, Patrick Warnaar, Marc Van Kemenade | 2012-06-26 |
| 8208139 | Alignment system and alignment marks for use therewith | Edo Maria Hulsebos, Patrick Warnaar | 2012-06-26 |
| 8208140 | Alignment system and alignment marks for use therewith | Edo Maria Hulsebos, Patrick Warnaar | 2012-06-26 |
| 8169593 | Lithographic apparatus and device manufacturing method | Joannes Theodoor De Smit | 2012-05-01 |
| 8130366 | Method for coarse wafer alignment in a lithographic apparatus | Patrick Warnaar | 2012-03-06 |
| 7562686 | Method and system for 3D alignment in wafer scale integration | Keith Frank Best, Geoffrey Norman Phillipps, Enno Van Den Brink, Henricus Wilhelmus Maria Van Buel, Joseph Consolini +1 more | 2009-07-21 |
| 7463337 | Substrate table with windows, method of measuring a position of a substrate and a lithographic apparatus | Henricus Wilhelmus Maria Van Buel | 2008-12-09 |
| 7433038 | Alignment of substrates for bonding | Roy Werkman | 2008-10-07 |