Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604419 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Joannes Jitse Venselaar, Anagnostis Tsiatmas, Samee Ur Rehman, Paul Christiaan Hinnen, Jean-Pierre Agnes Henricus Marie Vaessen +3 more | 2023-03-14 |
| 11067381 | Common-path integrated low coherence interferometry system and method therefor | Antonius van Leeuwen, Frank Coumans | 2021-07-20 |
| 11022897 | Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets | Joannes Jitse Venselaar, Anagnostis Tsiatmas, Samee Ur Rehman, Paul Christiaan Hinnen, Jean-Pierre Agnes Henricus Marie Vaessen +3 more | 2021-06-01 |
| 10753724 | Common-path integrated low coherence interferometry system and method therefor | Antonius van Leeuwen, Frank Coumans | 2020-08-25 |
| 10705430 | Method of measuring a parameter of interest, inspection apparatus, lithographic system and device manufacturing method | Gonzalo Roberto Sanguinetti, Jean-Pierre Agnes Henricus Marie Vaessen | 2020-07-07 |