Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7274434 | Lithographic apparatus and device manufacturing method | Manfred Bernhard Suddendorf | 2007-09-25 |
| 7177010 | Lithographic apparatus and device manufacturing method | Uwe Mickan, Markus Franciscus Antonius Eurlings, Jan Bernard Plechelmus Van Schoot | 2007-02-13 |
| 7170587 | Lithographic apparatus and device manufacturing method | Marcel Mathijs Theodore Marie Dierichs, Hendrikus Robertus Marie Van Greevenbroek | 2007-01-30 |
| 7151594 | Test pattern, inspection method, and device manufacturing method | Arie Jeffrey Den Boef, Antonius Johannes Josephus Van Dijsseldonk, Mircea Dusa, Antoine Gaston Marie Kiers | 2006-12-19 |
| 7112813 | Device inspection method and apparatus using an asymmetric marker | Arie Jeffrey Den Boef, Frank Bornebroek, Hugo Augustinus Joseph Cramer, Mircea Dusa, Richard Johannes Franciscus Van Haren +7 more | 2006-09-26 |
| 7075620 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors +1 more | 2006-07-11 |
| 7042550 | Device manufacturing method and computer program | Martin Lowisch, Marcel Mathijs Theodore Marie Dierichs, Koen Van Ingen Schenau, Martinus Hendrikus Antonius Leenders, Elaine McCoo +1 more | 2006-05-09 |
| 6963391 | Lithographic apparatus and device manufacturing method | Jan Evert Van Der Werf, George Arie Jan Fockert | 2005-11-08 |
| 6960775 | Lithographic apparatus, device manufacturing method and device manufactured thereby | Rene Hubert Jacobus Carpaij | 2005-11-01 |
| 6940587 | Lithographic apparatus and a measurement system | Johannes Jacobus Matheus Baselmans, Antonius Johannes Josephus Van Dijsseldonk, Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors | 2005-09-06 |
| 6897947 | Method of measuring aberration in an optical imaging system | Marco Hugo Petrus Moers | 2005-05-24 |
| 6787789 | Method of measuring aberration of a projection system of a lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2004-09-07 |
| 6721389 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Evert Van Der Werf, Mark Kroon, Wilhelmus Cornelis Keur, Vadim Yevgenyevich Banine, Johannes Hubertus Josephina Moors +1 more | 2004-04-13 |
| 6710856 | Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby | Marcel Mathijs Theodore Marie Dierichs, Hendrikus Robertus Marie Van Greevenbroek, Markus Franciscus Antonius Eurlings | 2004-03-23 |
| 6650399 | Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations | Johannes Jacobus Matheus Baselmans, Marco Hugo Petrus Moers, Robert Wilhelm Willekers, Wilhelmus Petrus De Boeij, Marcus Adrianus Van De Kerkhof | 2003-11-18 |
| 6646729 | Method of measuring aberration in an optical imaging system | Marco Hugo Petrus Moers | 2003-11-11 |
| 6028660 | Illumination unit for an optical apparatus | Johannes Catharinus Hubertus Mulkens, Judocus M. D. Stoeldrayer | 2000-02-22 |