Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7256873 | Enhanced lithographic resolution through double exposure | Jozef Maria Finders, Donis Flagello | 2007-08-14 |
| 7245356 | Lithographic apparatus and method for optimizing illumination using a photolithographic simulation | — | 2007-07-17 |
| 7180576 | Exposure with intensity balancing to mimic complex illuminator shape | — | 2007-02-20 |
| 7030966 | Lithographic apparatus and method for optimizing an illumination source using photolithographic simulations | — | 2006-04-18 |
| 7016017 | Lithographic apparatus and method for optimizing an illumination source using isofocal compensation | — | 2006-03-21 |
| 6839125 | Method for optimizing an illumination source using full resist simulation and process window response metric | — | 2005-01-04 |
| 4596643 | Cis-trans isomerization of olefinic compounds by photoinduced catalysis | — | 1986-06-24 |