Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12061422 | Method for fast loading substrates in a flat panel tool | Benjamin M. Johnston, Preston Fung, Sean Screws, Cheuk Ming LEE | 2024-08-13 |
| 11009801 | Dynamic cooling control for thermal stabilization for lithography system | Benjamin M. Johnston, David Michael CORRIVEAU, Cheuk Ming LEE, WeiMin Tao, Antoine P. Manens | 2021-05-18 |
| 10901328 | Method for fast loading substrates in a flat panel tool | Benjamin M. Johnston, Preston Fung, Sean Screws, Cheuk Ming LEE | 2021-01-26 |
| 10788762 | Dynamic cooling control for thermal stabilization for lithography system | Benjamin M. Johnston, David Michael CORRIVEAU, Cheuk Ming LEE, WeiMin Tao, Antoine P. Manens | 2020-09-29 |