Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11009801 | Dynamic cooling control for thermal stabilization for lithography system | Benjamin M. Johnston, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao, Antoine P. Manens | 2021-05-18 |
| 10788762 | Dynamic cooling control for thermal stabilization for lithography system | Benjamin M. Johnston, Cheuk Ming LEE, Jae Myung YOO, WeiMin Tao, Antoine P. Manens | 2020-09-29 |