Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Substrate carrier with integrated electrostatic chuck

Substrate carrier with integrated electrostatic chuck

US Patent 10304713 · Granted May 28, 2019

Estimated economic value: $34,437,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Electronic devices with borderless displays2025
Optical system for head-mounted display2024
Electronic devices with borderless displays2024
Roll-aboard travel bag2024
Optical system for head-mounted display2023
Gas diffusion shower head design for large area plasma enhanced chemical vapor d2023
RF choke for gas delivery to an RF driven electrode in a plasma processing appar2022
Roll-aboard garment bag2022
System and method for residual voltage control of electrostatic chucking assembl2021
RF choke for gas delivery to an RF driven electrode in a plasma processing appar2021
Flip edge shadow frame2020
Full-area counter-flow heat exchange substrate support2020