Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11692268 | Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition | Soo Young Choi, John M. White | 2023-07-04 |
| 8795793 | Gas diffusion shower head design for large area plasma enhanced chemical vapor deposition | Soo Young Choi, John M. White | 2014-08-05 |
| 7732010 | Method for supporting a glass substrate to improve uniform deposition thickness | Soo Young Choi, Beom Soo Park, Quanyuan Shang, John M. White, Dong-Kil Yim +2 more | 2010-06-08 |
| 6942753 | Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition | Soo Young Choi, Quanyuan Shang, Li Hou | 2005-09-13 |
| 6863077 | Method and apparatus for enhanced chamber cleaning | Sheng Sun, Quanyuan Shang, William Harshbarger | 2005-03-08 |
| 6432255 | Method and apparatus for enhancing chamber cleaning | Sheng Sun, Quanyuan Shang, William Harshbarger | 2002-08-13 |
| 6355108 | Film deposition using a finger type shadow frame | Tae Kyung Won, Quanyuan Shang, Robert Robertson, Soo Young Choi, Kam S. Law +1 more | 2002-03-12 |
| 5621763 | Apparatus and method for generating a transition between the on and off states of a radio frequency transmitter | Thomas J. Walczak, Stephen V. Cahill, John W. Diehl | 1997-04-15 |