Issued Patents All Time
Showing 26–50 of 252 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10096509 | Substrate carrier system with protective covering | Zuoqian Wang | 2018-10-09 |
| 10036966 | Environmental control of systems for photolithography process | Benjamin M. Johnston, Thomas Laidig | 2018-07-31 |
| 9959961 | Permanent magnetic chuck for OLED mask chucking | Zuoqian Wang | 2018-05-01 |
| 9935183 | Multilayer passivation or etch stop TFT | Dong-Kil Yim, Tae Kyung Won, Seon-Mee Cho | 2018-04-03 |
| 9927723 | Apparatus and methods for on-the-fly digital exposure image data modification | Benjamin M. Johnston, Thomas Laidig, Jang Fung Chen | 2018-03-27 |
| 9922854 | Vertical inline CVD system | Shinichi Kurita, Jozef Kudela, Suhail Anwar, Dong-Kil Yim, Hans Georg Wolf +3 more | 2018-03-20 |
| 9827578 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, Robin L. Tiner, Suhail Anwar, Gaku Furuta | 2017-11-28 |
| 9818580 | Transmission line RF applicator for plasma chamber | Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar, Ranjit Indrajit Shinde +2 more | 2017-11-14 |
| 9761365 | RF choke for gas delivery to an RF driven electrode in a plasma processing apparatus | Jozef Kudela, Carl A. Sorensen | 2017-09-12 |
| 9758869 | Anodized showerhead | Soo Young Choi, Suhail Anwar, Gaku Furuta, Beom Soo Park, Robin L. Tiner +1 more | 2017-09-12 |
| 9590113 | Multilayer passivation or etch stop TFT | Dong-Kil Yim, Tae Kyung Won, Seon-Mee Cho | 2017-03-07 |
| 9580804 | Diffuser support | Robin L. Tiner, Yeh Kurt Chang | 2017-02-28 |
| 9502242 | Indium gallium zinc oxide layers for thin film transistors | Tae Kyung Won, Soo Young Choi, Jung-Chi Lu | 2016-11-22 |
| 9463543 | Electromagnetic chuck for OLED mask chucking | Zuoqian Wang | 2016-10-11 |
| 9458538 | Method and apparatus for sealing an opening of a processing chamber | Shinichi Kurita, Takayuki Matsumoto, Robin L. Tiner, Suhail Anwar | 2016-10-04 |
| 9397380 | Guided wave applicator with non-gaseous dielectric for plasma chamber | Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar | 2016-07-19 |
| 9385239 | Buffer layers for metal oxide semiconductors for TFT | Kurtis Leschkies, Steven Verhaverbeke, Robert Jan Visser, Yan Ye, Dong-Kil Yim | 2016-07-05 |
| 9382621 | Ground return for plasma processes | Soo Young Choi, Robin L. Tiner, Shinichi Kurita, Carl A. Sorensen, Jeffrey A. Kho +3 more | 2016-07-05 |
| 9324597 | Vertical inline CVD system | Shinichi Kurita, Jozef Kudela, Suhail Anwar, Dong-Kil Yim, Hans Georg Wolf +3 more | 2016-04-26 |
| 9293706 | Method for encapsulating an organic light emitting diode | Dieter Haas, Byung Sung Kwak, Soo Young Choi, Jrjyan Jerry CHEN, Jose Manuel DIEGUEZ-CAMPO | 2016-03-22 |
| 9243328 | Susceptor with roll-formed surface and method for making same | Gaku Furuta, David Atchley, Soo Young Choi | 2016-01-26 |
| 9200368 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, Qunhua Wang, Li Hou, Ki Woon Kim, Shinichi Kurita +4 more | 2015-12-01 |
| 9187827 | Substrate support with ceramic insulation | Gaku Furuta, Shinichi Kurita, Soo Young Choi, Suhail Anwar, Robin L. Tiner | 2015-11-17 |
| 9068262 | Tightly fitted ceramic insulator on large area electrode | Jozef Kudela, Jonghoon Baek, Robin L. Tiner, Suhail Anwar, Gaku Furuta | 2015-06-30 |
| 9048518 | Transmission line RF applicator for plasma chamber | Jozef Kudela, Tsutomu Tanaka, Carl A. Sorensen, Suhail Anwar, Ranjit Indrajit Shinde +2 more | 2015-06-02 |