Issued Patents All Time
Showing 76–100 of 252 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8372205 | Reducing electrostatic charge by roughening the susceptor | Soo Young Choi, Beom Soo Park, Quanyuan Shang, Dong-Kil Yim, Chung-Hee Park | 2013-02-12 |
| 8365682 | Methods and apparatus for supporting substrates | Wendell T. Blonigan, Carl A. Sorensen, Robin L. Tiner | 2013-02-05 |
| 8361549 | Power loading substrates to reduce particle contamination | Dong-Kil Yim, Soo Young Choi, Han Byoul Kim, Jin Man Ha, Beom Soo Park | 2013-01-29 |
| 8343592 | Asymmetrical RF drive for electrode of plasma chamber | Jozef Kudela, Carl A. Sorensen, Soo Young Choi | 2013-01-01 |
| 8328939 | Diffuser plate with slit valve compensation | Soo Young Choi | 2012-12-11 |
| 8298625 | Multiple phase RF power for electrode of plasma chamber | Bradley O. Stimson | 2012-10-30 |
| D669032 | Flow blocking shadow frame support | Suhail Anwar, Soo Young Choi, Gaku Furuta, Shinichi Kurita, Carl Sorenson +1 more | 2012-10-16 |
| 8251009 | Shadow frame having alignment inserts | Lan Anh Duong, William N. Sterling | 2012-08-28 |
| 8225496 | Automated integrated solar cell production line composed of a plurality of automated modules and tools including an autoclave for curing solar devices that have been laminated | Robert Z. Bachrach, Yong Kee Chae, Soo Young Choi, Nicholas G. J. de Vries, Yacov Elgar +22 more | 2012-07-24 |
| 8206075 | Methods and apparatus for sealing a chamber | Shinichi Kurita, William N. Sterling, Yoshiaki Tanase | 2012-06-26 |
| 8174400 | Frequency monitoring to detect plasma process abnormality | Beom Soo Park, Soo Young Choi, Hong Soon Kim, James Hoffman | 2012-05-08 |
| 8173228 | Particle reduction on surfaces of chemical vapor deposition processing apparatus | Soo Young Choi, Beom Soo Park, Dong-Kil Yim | 2012-05-08 |
| 8147614 | Multi-gas flow diffuser | Carl A. Sorensen, Robin L. Tiner, Beom Soo Park, Soo Young Choi | 2012-04-03 |
| 8142606 | Apparatus for depositing a uniform silicon film and methods for manufacturing the same | Soo Young Choi, Tae Kyung Won, Beom Soo Park | 2012-03-27 |
| 8114484 | Plasma enhanced chemical vapor deposition technology for large-size processing | Ya-Tang Yang, Tae Kyung Won, Soo Young Choi, Takako Takehara | 2012-02-14 |
| 8110453 | Low temperature thin film transistor process, device property, and device stability improvement | Ya-Tang Yang, Beom Soo Park, Tae Kyung Won, Soo Young Choi | 2012-02-07 |
| 8083853 | Plasma uniformity control by gas diffuser hole design | Soo Young Choi, Qunhua Wang, Li Hou, Ki Woon Kim, Shinichi Kurita +4 more | 2011-12-27 |
| 8075952 | Power loading substrates to reduce particle contamination | Dong-Kil Yim, Soo Young Choi, Han Byoul Kim, Jin Man Ha, Beom Soo Park | 2011-12-13 |
| 8075690 | Diffuser gravity support | Ernst Keller, Robin L. Tiner, Jiri Kucera, Soo Young Choi, Beom Soo Park +1 more | 2011-12-13 |
| 8074599 | Plasma uniformity control by gas diffuser curvature | Soo Young Choi, Beom Soo Park, Robin L. Tiner | 2011-12-13 |
| 8004293 | Plasma processing chamber with ground member integrity indicator and method for using the same | Carl A. Sorensen | 2011-08-23 |
| 7992956 | Systems and methods for calibrating inkjet print head nozzles using light transmittance measured through deposited ink | Quanyuan Shang | 2011-08-09 |
| 7988129 | Floating slit valve for transfer chamber interface | Shinichi Kurita, Takayuki Matsumoto | 2011-08-02 |
| 7973546 | In-line electron beam test system | Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner +3 more | 2011-07-05 |
| 7959987 | Fuel cell conditioning layer | Tae Kyung Won, Robert Z. Bachrach, Wendell T. Blonigan | 2011-06-14 |