Issued Patents All Time
Showing 126–150 of 252 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7570130 | Apparatus and methods for a fixed impedance transformation network for use in connection with a plasma chamber | Carl A. Sorensen, Suhail Anwar | 2009-08-04 |
| 7556334 | Methods and apparatus for aligning print heads | Fan-Cheung Sze, Quanyuan Shang, Shinichi Kurita, Hongbin Ji, Janusz Jozwiak +2 more | 2009-07-07 |
| 7544723 | Blue printing ink for color filter applications | Lizhong Sun, Quanyuan Shang | 2009-06-09 |
| 7535238 | In-line electron beam test system | Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner +3 more | 2009-05-19 |
| 7534301 | RF grounding of cathode in process chamber | Robin L. Tiner, Beom Soo Park, Wendell T. Blonigan | 2009-05-19 |
| 7518466 | Methods and apparatus for symmetrical and/or concentric radio frequency matching networks | Carl A. Sorensen | 2009-04-14 |
| 7501161 | Methods and apparatus for reducing arcing during plasma processing | Li Hou, Qunhua Wang, Edwin Sum | 2009-03-10 |
| 7497767 | Vibration damping during chemical mechanical polishing | Hung Chih Chen, Shijian Li, Ramin Emami, Fred C. Redeker, Steven M. Zuniga +1 more | 2009-03-03 |
| 7476289 | Vacuum elastomer bonding apparatus and method | — | 2009-01-13 |
| 7460267 | Green printing ink for color filter applications | Lizhong Sun, Quanyuan Shang | 2008-12-02 |
| 7438175 | Linear vacuum deposition system | Wendell T. Blonigan | 2008-10-21 |
| 7432201 | Hybrid PVD-CVD system | Takako Takehara, Sheng Sun | 2008-10-07 |
| 7432184 | Integrated PVD system using designated PVD chambers | Akihiro Hosokawa, Makoto Inagawa, Hienminh Huu Le | 2008-10-07 |
| 7429410 | Diffuser gravity support | Ernst Keller, Robin L. Tiner, Jiri Kucera, Soo Young Choi, Beom Soo Park +1 more | 2008-09-30 |
| 7375946 | Method and apparatus for dechucking a substrate | Wendell T. Blonigan | 2008-05-20 |
| 7358192 | Method and apparatus for in-situ film stack processing | Walter R. Merry, Quanyuan Shang | 2008-04-15 |
| 7331847 | Vibration damping in chemical mechanical polishing system | Hung Chih Chen, Shijian Li, Fred C. Redeker, Ramin Emami | 2008-02-19 |
| 7303467 | Chemical mechanical polishing apparatus with rotating belt | Manoocher Birang, Lawrence Rosenberg, Sasson Somekh | 2007-12-04 |
| 7296673 | Substrate conveyor system | Wendell T. Blonigan | 2007-11-20 |
| 7270713 | Tunable gas distribution plate assembly | Wendell T. Blonigan, William Bagley | 2007-09-18 |
| 7226514 | Spin-rinse-dryer | Anwar Husain, Brian J. Brown, David G. Andeen, Svetlana Sherman, Michael Sugarman +2 more | 2007-06-05 |
| 7125758 | Controlling the properties and uniformity of a silicon nitride film by controlling the film forming precursors | Soo Young Choi, Tae Kyung Won, Gaku Furuta, Qunhua Wang, Beom Soo Park | 2006-10-24 |
| 7104875 | Chemical mechanical polishing apparatus with rotating belt | Manoocher Birang, Sasson Somekh, Lawrence Rosenberg | 2006-09-12 |
| 7087179 | Optical integrated circuits (ICs) | Cecilia Y. Mak, Kam S. Law, Dan Maydan | 2006-08-08 |
| 7055809 | Vaporizing reactant liquids for chemical vapor deposition film processing | Visweswaren Sivaramakrishnan | 2006-06-06 |