Issued Patents All Time
Showing 176–200 of 252 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624077 | Integrated circuit waveguide | — | 2003-09-23 |
| 6592439 | Platen for retaining polishing material | Shijian Li, Manoocher Birang, Ramin Emami, Andrew J. Nagengast, Douglas Orcutt Brown +2 more | 2003-07-15 |
| 6577923 | Apparatus and method for robotic alignment of substrates | Shinichi Kurita | 2003-06-10 |
| 6561884 | Web lift system for chemical mechanical planarization | Phillip R. Sommer, Sasson Somekh | 2003-05-13 |
| 6541384 | Method of initiating cooper CMP process | Lizhong Sun, Stan Tsai, Shijian Li | 2003-04-01 |
| 6516816 | Spin-rinse-dryer | Anwar Husain, Brian J. Brown, David G. Andeen, Svetlana Sherman, Michael Sugarman +2 more | 2003-02-11 |
| 6517303 | Substrate transfer shuttle | Norman L. Turner, Robin L. Tiner, Ernst Keller, Shinichi Kurita, Wendell T. Blonigan +1 more | 2003-02-11 |
| 6517048 | Isolation valves | Gary C. Ettinger | 2003-02-11 |
| 6488565 | Apparatus for chemical mechanical planarization having nested load cups | Phillip R. Sommer | 2002-12-03 |
| 6485359 | Platen arrangement for a chemical-mechanical planarization apparatus | Shijian Li, Fred C. Redeker, Manoocher Birang | 2002-11-26 |
| 6477980 | Flexibly suspended gas distribution manifold for plasma chamber | Ernst Keller, Wendell T. Blonigan | 2002-11-12 |
| 6475070 | Chemical mechanical polishing with a moving polishing sheet | — | 2002-11-05 |
| 6471459 | Substrate transfer shuttle having a magnetic drive | Wendell T. Blonigan | 2002-10-29 |
| 6435941 | Apparatus and method for chemical mechanical planarization | — | 2002-08-20 |
| 6435868 | Multi-function chamber for a substrate processing system | Wendell T. Blonigan, Michael W. Richter | 2002-08-20 |
| 6413873 | System for chemical mechanical planarization | Shijian Li, Lawrence Rosenberg, Martin Scales, Ramin Emami, James V. Tietz +1 more | 2002-07-02 |
| 6379231 | Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet | Manoocher Birang, Lawrence Rosenberg, Sasson Somekh | 2002-04-30 |
| 6371712 | Support frame for substrates | Larry Chang, Emanuel Beer | 2002-04-16 |
| 6355108 | Film deposition using a finger type shadow frame | Tae Kyung Won, Quanyuan Shang, Robert Robertson, Soo Young Choi, Kam S. Law +1 more | 2002-03-12 |
| 6322427 | Conditioning fixed abrasive articles | Shijian Li, Sidney P. Huey, Ramin Emami, Fritz Redeker | 2001-11-27 |
| 6308932 | Isolation valves | Gary C. Ettinger | 2001-10-30 |
| 6286230 | Method of controlling gas flow in a substrate processing system | Wendell T. Blonigan, Michael W. Richter | 2001-09-11 |
| 6273794 | Apparatus and method for grinding a semiconductor wafer surface | James V. Tietz | 2001-08-14 |
| 6261157 | Selective damascene chemical mechanical polishing | Rajeev Bajaj, Fritz Redeker, Shijian Li, Yutao Ma | 2001-07-17 |
| 6244935 | Apparatus and methods for chemical mechanical polishing with an advanceable polishing sheet | Manoocher Birang, Lawrence Rosenberg, Sasson Somekh | 2001-06-12 |