Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592439 | Platen for retaining polishing material | Shijian Li, Manoocher Birang, Ramin Emami, Andrew J. Nagengast, Douglas Orcutt Brown +2 more | 2003-07-15 |
| 6520841 | Apparatus and methods for chemical mechanical polishing with an incrementally advanceable polishing sheet | Manoocher Birang, Karl M. Robinson | 2003-02-18 |
| 6413873 | System for chemical mechanical planarization | Shijian Li, John M. White, Lawrence Rosenberg, Ramin Emami, James V. Tietz +1 more | 2002-07-02 |
| 6126382 | Apparatus for aligning substrate to chuck in processing chamber | David A. Pechin, Jeffrey C. Benzing, R. Marshall Stowell | 2000-10-03 |