Issued Patents All Time
Showing 101–125 of 252 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7923354 | Methods for depositing a microcrystalline silicon film for a photovoltaic device | Soo Young Choi, Takako Takehara, Yong Kee Chae | 2011-04-12 |
| 7902991 | Frequency monitoring to detect plasma process abnormality | Beom Soo Park, Soo Young Choi, Hong Soon Kim, James Hoffman | 2011-03-08 |
| 7884035 | Method of controlling film uniformity and composition of a PECVD-deposited A-SiNx : H gate dielectric film deposited over a large substrate surface | Beom Soo Park, Soo Young Choi, Tae Kyung Won | 2011-02-08 |
| 7879210 | Partially suspended rolling magnetron | Makoto Inagawa, Akihiro Hosokawa | 2011-02-01 |
| 7879409 | Repeatability of CVD film deposition during sequential processing of substrates in a deposition chamber | Gaku Furuta, Tae Kyung Won | 2011-02-01 |
| 7845891 | Decoupled chamber body | Jae-Chull Lee, Shinichi Kurita, Suhail Anwar | 2010-12-07 |
| D627625 | Shadow frame support | Suhail Anwar, Jeffrey A. Kho, Robin L. Tiner | 2010-11-23 |
| 7803420 | Methods and apparatus for inkjetting spacers in a flat panel display | Si Kyoung Kim, Sheng Sun | 2010-09-28 |
| 7785672 | Method of controlling the film properties of PECVD-deposited thin films | Soo Young Choi, Qunhua Wang, Beom Soo Park | 2010-08-31 |
| 7784164 | Electronic device manufacturing chamber method | Donald Verplancken, Shinichi Kurita | 2010-08-31 |
| 7754294 | Method of improving the uniformity of PECVD-deposited thin films | Soo Young Choi, Tae Kyung Won | 2010-07-13 |
| 7746088 | In-line electron beam test system | Fayez E. Abboud, Sriram Krishnaswami, Benjamin M. Johnston, Hung T. Nguyen, Matthias Brunner +3 more | 2010-06-29 |
| 7732010 | Method for supporting a glass substrate to improve uniform deposition thickness | Soo Young Choi, Beom Soo Park, Quanyuan Shang, Robert I. Greene, Dong-Kil Yim +2 more | 2010-06-08 |
| 7722925 | Showerhead mounting to accommodate thermal expansion | William N. Sterling | 2010-05-25 |
| 7681986 | Methods and apparatus for depositing ink onto substrates | Bassam Shamoun, Quanyuan Shang, Shinichi Kurita | 2010-03-23 |
| 7674662 | Process for making thin film field effect transistors using zinc oxide | Yan Ye, David Eaglesham | 2010-03-09 |
| 7655542 | Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device | Soo Young Choi, Takako Takehara, Yong Kee Chae | 2010-02-02 |
| 7648892 | Methods and apparatus for depositing a microcrystalline silicon film for photovoltaic device | Soo Young Choi, Takako Takehara, Yong Kee Chae | 2010-01-19 |
| 7637580 | Methods and apparatus for a high resolution inkjet fire pulse generator | Bassam Shamoun, Eugene Mirro, Janusz Jozwiak, Quanyuan Shang, Shinichi Kurita | 2009-12-29 |
| 7628899 | Apparatus and method of positioning a multizone magnetron assembly | Hien Minh Le, Akihiro Hosokawa | 2009-12-08 |
| 7625063 | Apparatus and methods for an inkjet head support having an inkjet head capable of independent lateral movement | Fan-Cheung Sze, Quanyuan Shang, Shinichi Kurita, Hongbin Ji, Janusz Jozwiak +2 more | 2009-12-01 |
| 7611217 | Methods and systems for inkjet drop positioning | Bassam Shamoun, Janusz Jozwiak, Eugene Mirro, Quanyuan Shang, Shinichi Kurita | 2009-11-03 |
| 7589031 | Method of avoiding haze formation on surfaces of silicon-containing PECVD-deposited thin films | Suhail Anwar, Chung-Hee Park, Beom Soo Park, Han Byoul Kim, Soo Young Choi | 2009-09-15 |
| 7588957 | CVD process gas flow, pumping and/or boosting | — | 2009-09-15 |
| 7588668 | Thermally conductive dielectric bonding of sputtering targets using diamond powder filler or thermally conductive ceramic fillers | Yan Ye | 2009-09-15 |