Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10460922 | Method and apparatus for substrate transfer in a thermal treatment chamber | Atsushi Kitani, Hsin-Hsien Wu, Chia-Hung Chen | 2019-10-29 |
| 10043693 | Method and apparatus for handling substrates in a processing system having a buffer chamber | Jaeyoung Kim, Atsushi Kitani, Young Taek Kwon | 2018-08-07 |
| 9008833 | Dynamic routing control methods and systems for a cluster tool | Hong Soon Kim, Atsushi Kitani | 2015-04-14 |
| 8674844 | Detecting plasma chamber malfunction | Beom Soo Park, Hong Soon Kim, Soo Young Choi, Suhail Anwar, John M. White | 2014-03-18 |
| 8670857 | Flexible process condition monitoring | Hong Soon Kim, Beom Soo Park | 2014-03-11 |
| 8643849 | Measurement systems and methods | Li Tao, Guiju Song, Xinjun Wan, Kevin George Harding, Steven Robert Hayashi +3 more | 2014-02-04 |
| 8174400 | Frequency monitoring to detect plasma process abnormality | Beom Soo Park, Soo Young Choi, John M. White, Hong Soon Kim | 2012-05-08 |
| 7902991 | Frequency monitoring to detect plasma process abnormality | Beom Soo Park, Soo Young Choi, John M. White, Hong Soon Kim | 2011-03-08 |
| 7834994 | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate | William Bagley, Paohuei Lee, Kyung Tae Kim, Sam Kim, Toshio Kiyotake +4 more | 2010-11-16 |
| 7784183 | System and method for adjusting performance of manufacturing operations or steps | Todd Jay Rockstroh | 2010-08-31 |
| 7477956 | Methods and apparatus for enhancing electronic device manufacturing throughput | Inchen Huang, Hongbin Ji | 2009-01-13 |
| 7474934 | Methods and apparatus for enhancing electronic device manufacturing throughput | Hongbin Ji, Inchen Huang | 2009-01-06 |
| 7440091 | Sensors for dynamically detecting substrate breakage and misalignment of a moving substrate | William Bagley, Paohuei Lee, Kyung Tae Kim, Sam Kim, Toshio Kiyotake +4 more | 2008-10-21 |
| 6716080 | Anodically bonded elements for flat-panel displays | Jason B. Elledge, Zhong-Yi Xia, David A. Cathey | 2004-04-06 |