Issued Patents All Time
Showing 26–50 of 107 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D942516 | Process shield for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2022-02-01 |
| 11201078 | Substrate position calibration for substrate supports in substrate processing systems | Tomoharu Matsushita, Aravind Kamath, Jallepally Ravi, Hiroyuki Takahama | 2021-12-14 |
| D933725 | Deposition ring for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2021-10-19 |
| 11043406 | Two piece shutter disk assembly with self-centering feature | Ananthkrishna Jupudi, Sarath Babu | 2021-06-22 |
| 11031273 | Physical vapor deposition (PVD) electrostatic chuck with improved thermal coupling for temperature sensitive processes | Bonnie T. Chia, Ross Marshall, Tomoharu Matsushita | 2021-06-08 |
| 11011676 | PVD buffer layers for LED fabrication | Mingwei Zhu, Rongjun Wang, Nag B. Patibandla, Xianmin Tang, Vivek Agrawal +5 more | 2021-05-18 |
| 10950475 | Method and apparatus for processing a substrate using non-contact temperature measurement | Vinodh Ramachandran, Ananthkrishna Jupudi, Yueh Sheng Ow, Preetham Rao, Ribhu Gautam +1 more | 2021-03-16 |
| 10892180 | Lift pin assembly | Bonnie T. Chia, Jallepally Ravi, Manjunatha Koppa, Vinod Konda Purathe, Aravind Kamath | 2021-01-12 |
| 10861742 | Interconnect structure having an etch stop layer over conductive lines | Chung-Ju Lee, Shau-Lin Shue, Tien-I Bao | 2020-12-08 |
| 10851453 | Methods and apparatus for shutter disk assembly detection | Ananthkrishna Jupudi, Eiji Asahina, Sarath Babu | 2020-12-01 |
| 10763086 | High conductance process kit | Bonnie T. Chia | 2020-09-01 |
| D893441 | Base plate for a processing chamber substrate support | Shreesha Yogish Rao, Mukund Sundararajan, Manjunatha Koppa, Steven V. Sansoni | 2020-08-18 |
| D891382 | Process shield for a substrate processing chamber | Manjunatha Koppa, Aravind Kamath, Manjunath H. Venkataswamappa, Steven V. Sansoni, David T. Or | 2020-07-28 |
| 10711348 | Apparatus to improve substrate temperature uniformity | Youqun Dong, Manjunatha Koppa | 2020-07-14 |
| 10704147 | Process kit design for in-chamber heater and wafer rotating mechanism | Muhammad M. Rasheed, Muhannad Mustafa, Hamid Tavassoli, Steven V. Sansoni, Vikash Banthia | 2020-07-07 |
| D888903 | Deposition ring for physical vapor deposition chamber | David Gunther, Kirankumar Neelasandra SAVANDAIAH | 2020-06-30 |
| 10665467 | Spacer etching process for integrated circuit design | Ru-Gun Liu, Chung-Ju Lee, Chih-Ming Lai, Chia-Ying Lee, Jyu-Horng Shieh +6 more | 2020-05-26 |
| 10593521 | Substrate support for plasma etch operations | Larry Frazier, John C. Forster, Mei Po (Mabel) Yeung, Michael S. Jackson | 2020-03-17 |
| 10312139 | Interconnect structure having an etch stop layer over conductive lines | Chung-Ju Lee, Shau-Lin Shue, Tien-I Bao | 2019-06-04 |
| 10262877 | Apparatus and method for reducing substrate sliding in process chambers | Sriskantharajah Thirunavukarasu, Kirankumar Neelasandra SAVANDAIAH, Kai Liang Liew | 2019-04-16 |
| 10134615 | Substrate support with improved RF return | Aravind Kamath, Jallepally Ravi, Tomoharu Matsushita, Yu Chang | 2018-11-20 |
| 10049919 | Semiconductor device including a target integrated circuit pattern | Chieh-Han Wu, Chung-Ju Lee, Ming-Feng Shieh, Ru-Gun Liu, Shau-Lin Shue +1 more | 2018-08-14 |
| 10014175 | Lithography using high selectivity spacers for pitch reduction | Yu-Sheng Chang, Chung-Ju Lee, Hai-Ching Chen, Hsiang-Huan Lee, Ming-Feng Shieh +5 more | 2018-07-03 |
| 9997404 | Method of forming an interconnect structure for a semiconductor device | Yung-Hsu Wu, Yu-Sheng Chang, Chia-Tien Wu, Chung-Ju Lee, Yung-Sung Yen +4 more | 2018-06-12 |
| 9911646 | Self-aligned double spacer patterning process | Yung-Hsu Wu, Tsung-Min Huang, Chung-Ju Lee, Tien-I Bao, Shau-Lin Shue | 2018-03-06 |