Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593521 | Substrate support for plasma etch operations | Cheng-Hsiung Tsai, John C. Forster, Mei Po (Mabel) Yeung, Michael S. Jackson | 2020-03-17 |
| 7550090 | Oxygen plasma clean to remove carbon species deposited on a glass dome surface | Quancheng (Tommy) Gu, Cheng-Hsiung Tsai, John C. Forster, Xiaoxi Guo | 2009-06-23 |