Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10593521 | Substrate support for plasma etch operations | Larry Frazier, Cheng-Hsiung Tsai, John C. Forster, Michael S. Jackson | 2020-03-17 |
| 7780814 | Wafer pre-clean reactor cable termination for selective suppression/reflection of source and bias frequency cross products | John Pipitone, Kenneth Smyth | 2010-08-24 |