Issued Patents All Time
Showing 51–60 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9624593 | Anodization architecture for electro-plate adhesion | Jennifer Y. Sun | 2017-04-18 |
| 9617188 | Rare-earth oxide based coating | Jennifer Y. Sun | 2017-04-11 |
| 9604249 | Innovative top-coat approach for advanced device on-wafer particle performance | Jennifer Y. Sun, Dmitry Lubomirsky, Vahid Fioruzdor | 2017-03-28 |
| 9583369 | Ion assisted deposition for rare-earth oxide based coatings on lids and nozzles | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2017-02-28 |
| 9440886 | Rare-earth oxide based monolithic chamber material | Jennifer Y. Sun | 2016-09-13 |
| 9420639 | Smart device fabrication via precision patterning | Jennifer Y. Sun, Yikai Chen, Vahid Firouzdor | 2016-08-16 |
| 9394615 | Plasma resistant ceramic coated conductive article | Jennifer Y. Sun, Ren-Guan Duan, Hamid Noorbakhsh, Junhan Yuh, Dmitry Lubomirsky | 2016-07-19 |
| 9343289 | Chemistry compatible coating material for advanced device on-wafer particle performance | Jennifer Y. Sun, Dmitry Lubomirsky | 2016-05-17 |
| 9212099 | Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics | Jennifer Y. Sun, Ren-Guan Duan, Dmitry Lubomirsky | 2015-12-15 |
| 9090046 | Ceramic coated article and process for applying ceramic coating | Jennifer Y. Sun, Ren-Guan Duan, Sumit Agarwal, Dmitry Lubomirsky | 2015-07-28 |