Issued Patents All Time
Showing 26–50 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10544500 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Vahid Firouzdor | 2020-01-28 |
| 10501843 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho | 2019-12-10 |
| 10468235 | Plasma spray coating enhancement using plasma flame heat treatment | Jennifer Y. Sun, Yikai Chen | 2019-11-05 |
| 10418229 | Aerosol deposition coating for semiconductor chamber components | Jennifer Y. Sun, Tom K. Cho, Ying Zhang | 2019-09-17 |
| 10385459 | Advanced layered bulk ceramics via field assisted sintering technology | Jennifer Y. Sun, Yikai Chen | 2019-08-20 |
| 10364197 | Heat treated ceramic substrate having ceramic coating | Jennifer Y. Sun, Ren-Guan Duan, Dmitry Lubomirsky | 2019-07-30 |
| 10196728 | Plasma spray coating design using phase and stress control | Jennifer Y. Sun, Yikai Chen | 2019-02-05 |
| 10189141 | Chamber components with polished internal apertures | Jennifer Y. Sun, Vahid Firouzdor, David Koonce | 2019-01-29 |
| 10119188 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho | 2018-11-06 |
| 10020170 | Chemistry compatible coating material for advanced device on-wafer particle performance | Jennifer Y. Sun, Dmitry Lubomirsky | 2018-07-10 |
| 9976211 | Plasma erosion resistant thin film coating for high temperature application | Vahid Firouzdor, Jennifer Y. Sun, Martin Jeff Salinas, Jared Ahmad Lee | 2018-05-22 |
| 9970095 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Vahid Firouzdor | 2018-05-15 |
| 9916998 | Substrate support assembly having a plasma resistant protective layer | Jennifer Y. Sun, Senh Thach, Vahid Firouzdor | 2018-03-13 |
| 9890086 | Rare-earth oxide based monolithic chamber material | Jennifer Y. Sun | 2018-02-13 |
| 9884787 | Rare-earth oxide based monolithic chamber material | Jennifer Y. Sun | 2018-02-06 |
| 9869013 | Ion assisted deposition top coat of rare-earth oxide | Jennifer Y. Sun, Vahid Firouzdor | 2018-01-16 |
| 9869012 | Ion assisted deposition for rare-earth oxide based coatings | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2018-01-16 |
| 9865434 | Rare-earth oxide based erosion resistant coatings for semiconductor application | Jennifer Y. Sun, Tom K. Cho | 2018-01-09 |
| 9850568 | Plasma erosion resistant rare-earth oxide based thin film coatings | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho | 2017-12-26 |
| 9812341 | Rare-earth oxide based coatings based on ion assisted deposition | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2017-11-07 |
| 9797037 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2017-10-24 |
| 9725799 | Ion beam sputtering with ion assisted deposition for coatings on chamber components | Jennifer Y. Sun, Vahid Firouzdor, Tom K. Cho, Vedapuram S. Achutharaman, Ying Zhang | 2017-08-08 |
| 9708713 | Aerosol deposition coating for semiconductor chamber components | Jennifer Y. Sun, Tom K. Cho, Ying Zhang | 2017-07-18 |
| 9711334 | Ion assisted deposition for rare-earth oxide based thin film coatings on process rings | Jennifer Y. Sun, Vahid Firouzdor, Ying Zhang | 2017-07-18 |
| 9687953 | Chamber components with polished internal apertures | Jennifer Y. Sun, Vahid Firouzdor, David Koonce | 2017-06-27 |