Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Methods of seasoning process chambers

Methods of seasoning process chambers

US Patent 11996273 · Granted May 28, 2024

Estimated economic value: $67,076,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Showerhead design to control stray deposition2025
Showerhead design to control stray deposition2025
Stress treatments for cover wafers2024
Stress treatments for cover wafers2024
Method of using dual frequency RF power in a process chamber2024
Method of using dual frequency RF power in a process chamber2024
Method of using dual frequency RF power in a process chamber2024
Apparatus and methods for sample analysis with multi-gradient microfluidics2024
Chucking process and system for substrate processing chambers2024
Shunt door for magnets in plasma process chamber2024
Techniques to improve adhesion and defects for tungsten carbide film2024
Techniques to improve adhesion and defects for tungsten carbide film2024