Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11976357 | Methods for forming a protective coating on processing chamber surfaces or components | Geetika Bajaj, Prerna Goradia, Ankur Kadam | 2024-05-07 |
| 11118263 | Method for forming a protective coating film for halide plasma resistance | Kevin A. PAPKE, Emily Thomson, Mahmut Sami Kavrik, Andrew C. Kummel | 2021-09-14 |
| 10941303 | Chemical conversion of yttria into yttrium fluoride and yttrium oxyfluoride to develop pre-seasoned corossion resistive coating for plasma components | Mats Larsson, Jianqi Wang, Kevin A. PAPKE | 2021-03-09 |
| 10886137 | Selective nitride removal | Prerna Goradia, Geetika Bajaj, Robert Jan Visser, Nitin K. Ingle | 2021-01-05 |
| 10253406 | Method for forming yttrium oxide on semiconductor processing equipment | Laksheswar Kalita, Prerna Goradia, Geetika Bajaj, Yixing Lin, Dmitry Lubomirsky +4 more | 2019-04-09 |
| 10233554 | Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment | Laksheswar Kalita, Geetika Bajaj, Kevin A. PAPKE, Ankur Kadam, Bipin Thakur +3 more | 2019-03-19 |
| 9903020 | Generation of compact alumina passivation layers on aluminum plasma equipment components | Sung Je Kim, Laksheswar Kalita, Ankur Kadam, Prerna Goradia, Bipin Thakur +1 more | 2018-02-27 |