Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10253406 | Method for forming yttrium oxide on semiconductor processing equipment | Laksheswar Kalita, Prerna Goradia, Geetika Bajaj, Yogita Pareek, Yixing Lin +4 more | 2019-04-09 |
| 10233554 | Aluminum electroplating and oxide formation as barrier layer for aluminum semiconductor process equipment | Yogita Pareek, Laksheswar Kalita, Geetika Bajaj, Kevin A. PAPKE, Ankur Kadam +3 more | 2019-03-19 |
| 9903020 | Generation of compact alumina passivation layers on aluminum plasma equipment components | Sung Je Kim, Laksheswar Kalita, Yogita Pareek, Ankur Kadam, Prerna Goradia +1 more | 2018-02-27 |
| 8709537 | Methods for enhancing tantalum filament life in hot wire chemical vapor deposition processes | Joe Griffith Cruz, Stefan Keller, Vikas Gujar, Ravindra Patil | 2014-04-29 |
| 8334017 | Apparatus and methods for forming energy storage and photovoltaic devices in a linear system | Victor L. Pushparaj, Pravin K. Narwankar, Dieter Haas, Mahesh Arcot, Vikas Gujar +1 more | 2012-12-18 |