Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11118263 | Method for forming a protective coating film for halide plasma resistance | Yogita Pareek, Kevin A. PAPKE, Emily Thomson, Andrew C. Kummel | 2021-09-14 |
| 10840350 | Nanolaminate structure, semiconductor device and method of forming nanolaminate structure | Zi-Wei Fang, Hong-Fa Luan, Wilman Tsai, Kasra Sardashti, Maximillian Clemons +4 more | 2020-11-17 |