Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Multi-layer plasma erosion protection for chamber components

Multi-layer plasma erosion protection for chamber components

US Patent 10755900 · Granted Aug 25, 2020

Estimated economic value: $29,525,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Semiconductor chamber components with high-performance coating2025
Halogen resistant coatings and methods of making and using thereof2025
Protective metal oxy-fluoride coatings2025
Extreme uniformity heated substrate support assembly2025
Atomic layer deposition coatings for high temperature ceramic components2025
Adjustable de-chucking voltage2025
Semiconductor chamber components with advanced dual layer nickel-containing coat2025
Ion extraction optics having non uniform grid assembly2025
System architecture of manufacturing of semiconductor wafers2025
Semiconductor chamber components with advanced coating techniques2025
Hafnium aluminum oxide coatings deposited by atomic layer deposition2025
Hafnium aluminum oxide coatings deposited by atomic layer deposition2025