Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12125732 | High density corrosion resistant layer arrangement for electrostatic chucks | — | 2024-10-22 |
| 11673842 | Method for manufacturing large ceramic co-fired articles | Samuel H. Ahrendes, Gary D. Harland, Edward Tomasek, George York | 2023-06-13 |
| 11572617 | Protective metal oxy-fluoride coatings | David Fenwick, Jennifer Y. Sun, Yikai Chen | 2023-02-07 |
| 11535550 | Yttrium aluminum silicate glass ceramic coating for semiconductor chamber apparatus | — | 2022-12-27 |
| 11091398 | Method for manufacturing large ceramic co-fired articles | Samuel H. Ahrendes, Gary D. Harland, Edward Tomasek, George York | 2021-08-17 |
| 10773995 | Low temperature fluoride glasses and glazes | Jennifer Y. Sun | 2020-09-15 |
| 10612121 | Plasma resistant coating with tailorable coefficient of thermal expansion | Jennifer Y. Sun | 2020-04-07 |
| 9999907 | Cleaning process that precipitates yttrium oxy-flouride | Jennifer Y. Sun, Yikai Chen | 2018-06-19 |
| 9957192 | Low temperature fluoride glasses and glazes | Jennifer Y. Sun | 2018-05-01 |
| 9850161 | Fluoride glazes from fluorine ion treatment | Jennifer Y. Sun | 2017-12-26 |