Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools

Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools

US Patent 12004337 · Granted Jun 4, 2024

Estimated economic value: $68,807,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Halogen resistant coatings and methods of making and using thereof2025
Halogen resistant coatings and methods of making and using thereof2025
Halogen resistant coatings and methods of making and using thereof2025
Protective metal oxy-fluoride coatings2025
Protective metal oxy-fluoride coatings2025
Atomic layer deposition coating system for inner walls of gas lines2025
Atomic layer deposition coatings for high temperature ceramic components2025
Parallel atomic layer deposition of target element interiors2025
System, device, and method for cell cryopreservation via sand-mediated ice seedi2025
Methodology for coating non-conducting articles with broad-spectrum antimicrobia2025
Multi-turn drive assembly and systems and methods of use thereof2025
Multi-turn drive assembly and systems and methods of use thereof2025