Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7132672 | Faraday dose and uniformity monitor for plasma based ion implantation | Steven R. Walther, Rajesh Dorai, Harold Persing, Bon-Woong Koo, Bjorn O. Pedersen +2 more | 2006-11-07 |
| 7126808 | Wafer platen equipped with electrostatic clamp, wafer backside gas cooling, and high voltage operation capability for plasma doping | Bon-Woong Koo, Bjorn O. Pedersen, Erik Mitchell | 2006-10-24 |
| 6791097 | Adjustable conductance limiting aperture for ion implanters | Anthony Renau, Eric D. Hermanson | 2004-09-14 |