Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10573541 | System for semiconductor wafer retention and sensing in a vacuum load lock | — | 2020-02-25 |
| 9611540 | Electrostatic chuck shielding mechanism | Kan Ota, Steve Drummond | 2017-04-04 |
| 9236216 | In-vacuum high speed pre-chill and post-heat stations | William Davis Lee, William P. Reynolds | 2016-01-12 |
| 7236853 | Automated robot alignment system and method using kinematic pins and end effector sensor | Kevin M. Daniels | 2007-06-26 |
| 7214027 | Wafer handler method and system | — | 2007-05-08 |