Issued Patents All Time
Showing 76–78 of 78 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7453059 | Technique for monitoring and controlling a plasma process | Ziwei Fang, Ludovic Godet, Vikram Singh, Vassilis Panayotis Vourloumis, Bernard G. Lindsay | 2008-11-18 |
| 7132672 | Faraday dose and uniformity monitor for plasma based ion implantation | Steven R. Walther, Rajesh Dorai, Harold Persing, Jay T. Scheuer, Bjorn O. Pedersen +2 more | 2006-11-07 |
| 7126808 | Wafer platen equipped with electrostatic clamp, wafer backside gas cooling, and high voltage operation capability for plasma doping | Bjorn O. Pedersen, Jay T. Scheuer, Erik Mitchell | 2006-10-24 |